IN SITU CLEANING APPARATUS AND SYSTEM THEREOF
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United States of America Patent
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Issued Date -
Apr 2, 2020
app pub date -
Dec 4, 2019
filing date -
Oct 18, 2013
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Abstract
An apparatus includes: a sprinkler configured for spraying liquid; a conduit with a nano-particle coated surface; a sensor associated with the conduit, wherein the sensor is configured to detect a signal corresponding to a film deposition on the nano-particle coated surface; and a controller coupled with the sensor and the sprinkler, wherein the controller is configured to regulate liquid spraying of the sprinkler over the nano-particle coated surface.
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