PLATEN ASSEMBLY AND METHOD OF ASSEMBLING A PLATEN ASSEMBLY
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United States of America Patent
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Issued Date -
Apr 2, 2020
app pub date -
Aug 7, 2019
filing date -
Sep 28, 2018
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Abstract
A method and apparatus for a separable assembly in a platen assembly is provided. The two components of the separable assembly couple together through the first coupling member and the second coupling member, and the coupling is magnetic. The web assembly and hub assembly are placed or decoupled via the methods as described above. The separable components of the assembly reduce the cost and time of removing the entire platen assembly from the CMP system when maintenance or repair is to be performed.
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