Polishing apparatus, polishing method, and machine learning apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11027395
APP PUB NO 20200101579A1
SERIAL NO

16579296

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Abstract

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A polishing unit 3A includes a state acquisition section 846 and a learning section. The state acquisition section can acquire a state variable including at least one of data on a state of a top ring making up the polishing unit and data on a state of a semiconductor wafer. The learning section has learned a relationship between the state variable and a change in film thickness of the semiconductor wafer using a neural network, the learning section being capable of receiving the state variable from the state acquisition section to predict the change and/or receiving the state variable from the state acquisition section to determine that the change is abnormal.

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Patent Owner(s)

  • EBARA CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Suzuki, Yuta Tokyo, JP 141 331

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