Fabrication techniques and structures for gettering materials in ultrasonic transducer cavities

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United States of America Patent

PATENT NO 11655141
APP PUB NO 20200102214A1
SERIAL NO

16585283

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Abstract

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A method of forming an ultrasound transducer device includes bonding a membrane to a substrate so as to form a sealed cavity between the membrane and the substrate. An exposed surface located within the sealed cavity includes a getter material that is electrically isolated from a bottom electrode of the cavity.

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Patent Owner(s)

  • BFLY OPERATIONS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fife, Keith G Palo Alto, US 215 4162
Liu, Jianwei Fremont, US 120 461
Lutsky, Joseph Los Altos, US 18 146
Miao, Lingyun Fremont, US 21 172

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