Laser irradiation apparatus, driving method thereof, and method of manufacturing display device using the same
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United States of America Patent
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Jul 18, 2023
Grant Date -
Apr 2, 2020
app pub date -
Sep 12, 2019
filing date -
Oct 1, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
A laser irradiation apparatus includes a stage on which a substrate is provided, a laser irradiation unit which irradiates a laser to the substrate on the stage, an image acquiring unit which acquires an image of a predetermined region of the substrate, and a control unit electrically connected to the laser irradiation unit and the image acquiring unit, where the control unit calculates a brightness value corresponding to an average value of grayscale values of the image provided from the image acquiring unit, compares a calculated brightness value with a reference brightness value, and outputs data on performance of the laser based on a result of comparing the calculated brightness value with the reference brightness value.
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