Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber

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United States of America Patent

PATENT NO 10684009
APP PUB NO 20200132300A1
SERIAL NO

16725613

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Abstract

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An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTDHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Yen-Hsun Hsinchu, TW 23 28
Li, Ping-Cheng Hsinchu, TW 17 23
Tsai, Ming-Hsun Hsinchu, TW 43 37

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