PLASMA GENERATOR, LIGHT EMISSION ANALYSIS DEVICE AND MASS SPECTROMETER EQUIPPED WITH THE PLASMA GENERATOR, AND DEVICE STATUS DETERMINATION METHOD
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United States of America Patent
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Jun 18, 2020
app pub date -
Jun 14, 2018
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Jul 13, 2017
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Abstract
A high-frequency power supply unit (2) supplies high-frequency power to an induction coil. A status determination processing unit (81) determines a status of a plasma generator based on a change in a frequency of the high-frequency power supplied to the induction coil by the high-frequency power supply unit (2). By determining the status of the plasma generator based on the change in the frequency of the high-frequency power supplied to the induction coil, it is possible to more accurately determine the status of the device based on stable determination criteria.
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