SPUTTERING TARGET AND METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUCING MAGNETIC RECORDING MEDIUM

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United States of America Patent

APP PUB NO 20200234730A1
SERIAL NO

16628896

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present disclosure provides a sputtering target containing one or more metals of Fe, Co, Cr, and Pt, and one or more of C and BN, with less generation of particles, and a method for producing the same. A sputtering target including: one or more metallic phases selected from a group consisting of Fe, Co, Cr, and Pt; and one or more nonmetallic phases selected from a group consisting of C and BN, wherein the sputtering target satisfies: A≤40, and A/B≤1.7 in which A represents the number of boundaries between the metallic phases and the nonmetallic phases on a line segment having a length of 500 μm drawn in a vertical direction, in a structure photograph; and B represents the number of boundaries between the metallic phases and the nonmetallic phases on a line segment having a length of 500 μm drawn in a horizontal direction, in the structure photograph.

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Patent Owner(s)

Patent OwnerAddress
JX NIPPON MINING & METALS CORPORATION10-4 TORANOMON 2-CHOME MINATO-KU TOKYO 1058417

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
OGINO, Shin-ichi Ibaraki, JP 24 169

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