Vacuum Pumps For Single And Multi-Process Chamber Flow Stream Sharing
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United States of America Patent
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Issued Date -
Aug 13, 2020
app pub date -
Feb 13, 2020
filing date -
Feb 13, 2019
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Abstract
Exhaust systems for handling multiple effluent streams are described. Some embodiments include pressure drops to prevent perturbations from one effluent source from affecting a second effluent source. Some embodiments incorporate an exhaust assembly with multiple inlets and pumps and a single outlet. The exhaust assembly includes shared auxiliary components like purge and cooling systems.
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