STERILIZED-LIQUEFIED GAS APPARATUS AND CONNECTIN PIPE THEREOF

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United States of America Patent

APP PUB NO 20200345881A1
SERIAL NO

16759232

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Abstract

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A sterilized-liquefied gas apparatus of the invention includes: a liquefied gas reservoir; a source-gas supplier that supplies a source gas to the liquefied gas reservoir; a cooler that cools down an inside of the liquefied gas reservoir and thereby liquefies the source gas; a supply pipe that connects the source gas supplier and the liquefied gas reservoir; a sterilization filter provided in the supply pipe; a sterilizer that sterilizes, by a sterilizing gas, a sterilization region that is located further downstream than the sterilization filter; and a sterilizing-gas remover that removes the sterilizing gas after sterilization.

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Patent Owner(s)

Patent OwnerAddress
ULVAC INC2500 HAGISONO KANAGAWA CHIGASAKI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
YOSHIMOTO, Tsuyoshi Chigasaki-shi, JP 16 57

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