Wet substrate processing device
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United States of America Patent
Stats
-
Sep 20, 2022
Grant Date -
Dec 3, 2020
app pub date -
Apr 26, 2020
filing date -
May 27, 2019
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Provided is a stirring paddle driving mechanism with a small load. According to one embodiment, a wet substrate processing device is provided, having: a treatment tank for holding a treatment solution; a stirring paddle disposed inside the treatment tank; and a driving mechanism for driving the stirring paddle, wherein the driving mechanism has: a rotary motor; a central rotating member connected to the rotary motor; an outer fixed ring spaced from the central rotating member and surrounding an outside of the central rotating member; a planetary member connected to the central rotating member so as to rotate inside the outer fixed ring; and a driving shaft connected to the planetary member and the stirring paddle and extending in a radial direction of the outer fixed ring, wherein the driving shaft is configured to reciprocate in a longitudinal direction by rotation of the rotary motor.
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