Systems and methods for integrating a-axis oriented barium titanate thin films on silicon (001) via strain control

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United States of America Patent

PATENT NO 11561421
APP PUB NO 20200409190A1
SERIAL NO

16912316

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Abstract

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Various embodiments of the present technology enable growth of a-axis oriented barium titanate (BTO) films by inserting a relaxed strain control layer having a larger lattice constant than the c-axis of BTO and a similar thermal expansion mismatch. As a result, in-plane tensile stress causes BTO to grow with its ferroelectric polarization in-plane. Some embodiments allow for BTO films to immediately be grown on silicon with a-axis orientation, and without the need to create thick layers for relaxation. Using various embodiments of the present technology, the BTO can be grown in-plane with minimal dislocation density that is confined to the interface region.

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Patent OwnerAddress
BOARD OF REGENTS THE UNIVERSITY OF TEXAS SYSTEM201 WEST 7TH STREET AUSTIN TX 78701

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Demkov, Alexander A Austin, US 21 100
Posadas, Agham Round Rock, US 5 4
Reynaud, Marc Austin, US 11 167

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