METHOD OF MANUFACTURE OF A FILM MADE OF VANADIUM DISULFIDE FILM AND FILM WHICH CAN BE OBTAINED BY THIS METHOD
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United States of America Patent
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Jan 14, 2021
app pub date -
Jun 26, 2020
filing date -
Jul 9, 2019
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Abstract
A method to manufacture a film made of vanadium disulphide by chemical vapor deposition on a previously heated substrate, includes successive procedures implemented in a vacuum reactor: injection of at least one organometallic molecule of vanadium, where the vanadium has a valence of less than or equal to 4; drainage of the reactor; injection of at least one sulphur molecule including at least one free thiol group, or forming a reaction intermediate comprising at least one free thiol group; injection of a reducing gas.
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