OPTICAL DIFFERENCE DETECTOR AND INSPECTION DEVICE
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United States of America Patent
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Issued Date -
Jan 14, 2021
app pub date -
Mar 19, 2019
filing date -
May 29, 2018
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Abstract
An optical difference detector includes a first APD and a second APD, a first voltage application unit that applies a first bias voltage to the first APD and a second voltage application unit that applies a second bias voltage to the second APD, a differential amplifier that is connected in parallel to the first APD and the second APD and amplifies a difference between a first signal current output from the first APD and a second signal current output from the second APD, and a feedback control unit that controls the second bias voltage so that a low frequency component of a first monitoring current in the first APD and a low frequency component of a second monitoring current in the second APD are equal.
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