COPPER OXIDE NANOSENSOR
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United States of America Patent
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Issued Date -
Jan 21, 2021
app pub date -
Mar 11, 2019
filing date -
Mar 16, 2018
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Abstract
A system and method of nanoparticle deposition for achieving an acetone sensitive response based on ruthenium decorated CuO nanowires at temperatures of 200° C. and 250° C. is disclosed. This method is useful for building sensors. The method used to build the sensor is easily integrable into silicon technology broadly, and into a CMOX compatible device specifically. Additionally, it is expected that this method of nanoparticle deposition can be transferred to other MOx nanowire sensors, such as but not limited to zinc oxide nanowire.
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