Fe-Pt-OXIDE-BN-BASED SINTERED COMPACT FOR SPUTTERING TARGET

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United States of America Patent

APP PUB NO 20210032741A1
SERIAL NO

16982375

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Abstract

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Provided is an Fe—Pt-oxide-BN-based sintered compact for a high-density sputtering target that can suppress generation of particles during sputtering.

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Patent Owner(s)

Patent OwnerAddress
TANAKA KIKINZOKU KOGYO K KCHIYODA-KU TOKYO 100-6422

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Hironori Ibaraki, JP 183 1374
Kurose, Kenta Ibaraki, JP 4 0
Miyashita, Takanobu Ibaraki, JP 17 33
Nishiura, Masahiro Ibaraki, JP 21 165
Yamamoto, Takamichi Ibaraki, JP 12 9

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