NANOIMPRINTING BY USING SOFT MOLD AND RESIST SPREADING
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United States of America
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Dec 10, 2020
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Dec 10, 2020
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Abstract
A flexible mold has a mold body having a nanoimprinting microstructure and is gradually thickened from its periphery to the middle. Also, a resist spreading nanoimprinting method that integrates a soft mold into a dovetailed meal ring and then deforms it to form a point contact with a substrate before an imprinting process is followed and then convert a loading force into a specific distributed contact pressure for driving the resist flow by using an elastomer cushion pad with a pre-designed convex surface.
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