IMAGING DEVICES HAVING PIEZOELECTRIC TRANSCEIVERS

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United States of America Patent

APP PUB NO 20210172788A1
SERIAL NO

17180308

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.

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Patent Owner(s)

Patent OwnerAddress
EXO IMAGING INC4201 BURTON DRIVE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
AKKARAJU, Sandeep Wellesley, US 51 320
BIRCUMSHAW, Brian Oakland, US 34 153
KWON, Haesung Austin, US 63 476

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