Centrally anchored MEMS-based active cooling systems

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United States of America Patent

PATENT NO 11464140
APP PUB NO 20210176894A1
SERIAL NO

16915912

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Abstract

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A cooling system is described. The cooling system includes a cooling element having a central region and a perimeter. The cooling element is anchored at the central region. At least a portion of the perimeter is unpinned. The cooling element is in communication with a fluid. The cooling element is actuated to induce vibrational motion to drive the fluid toward a heat-generating structure.

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Patent Owner(s)

  • FRORE SYSTEMS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ganti, Suryaprakash Los Altos, US 109 2686
Madhavapeddy, Seshagiri Rao La Jolla, US 55 502
Mukundan, Vikram San Ramon, US 26 95
Rayapati, Narayana Prasad Mountain View, US 10 33
Sathyamurthy, Prabhu San Jose, US 38 170
Yalamarthy, Ananth Saran Stanford, US 22 69

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