Cutting apparatus and cutting method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11745374
APP PUB NO 20210229306A1
SERIAL NO

17144318

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A cutting apparatus includes a holding table that has at at least a part of a holding surface a transparent section including a transparent member and that holds a workpiece, a cutting unit including a cutting blade that cuts the workpiece held by the holding table, and a cutting water nozzle that supplies cutting water during cutting of the workpiece by the cutting blade, an imaging camera that images the workpiece through the transparent section, and a removing unit that removes a liquid adhered to the transparent section. The removing unit includes a contact member positioned at a contact position for making contact with the transparent section and a retracted position, and an X-axis moving unit that relatively moves on the transparent section the contact member making contact with the transparent section.

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First Claim

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Patent Owner(s)

  • DISCO CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hanajima, Satoshi Tokyo, JP 13 51
Nakama, Jun Tokyo, JP 3 2

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