SURFACE CLEAN SYSTEM AND METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20210237228A1
SERIAL NO

17119464

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A portable handheld cleaning device is provided capable of cleaning the surface of the substrate table without damaging the surface. The portable handheld cleaning device in accordance with the present disclosure includes a base having a first side and a second side (the first side and the second side overlapping each other), a hollow structure on the first side of the base, and a weight holding space within the hollow structure. A grinding pad is provided on the second side of the base. The grinding pad includes a cleaning surface, the cleaning surface having a plurality of substantial pyramid shaped grits.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Cheng-Chieh Tainan City, TW 18 17
Su, Pei-Yi Taichung City, TW 18 35

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