Importance

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Abstract

A scanning probe microscope (50) is provided with a probe (20), a cantilever (2) supporting the probe (20), a scanner (43) on which a sample (S) is placed, a drive unit (4) for changing the distance between the sample (S) and the probe (20), and a displacement measurement unit (3) for measuring the displacement of the cantilever (2). The scanning probe microscope (50) is provided with a curve generation unit (11) for generating a first curve representing the relation between the distance between the probe (20) and the sample (S) and the quantity representing the displacement of the cantilever (2) when the sample (S) approaches the probe (20) and a second curve representing the relation between the distance between the probe (20) and the sample (S) when the sample (S) moves away from the probe (20) and the quantity representing the displacement of the cantilever (2), and a physical quantity calculation unit (53) for determining the quantity representing the area between the first curve and the second curve as a physical quantity of the sample.

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