POLYURETHANE FOR POLISHING LAYERS, POLISHING LAYER AND POLISHING PAD
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United States of America
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Issued Date -
Dec 16, 2021
app pub date -
Sep 3, 2019
filing date -
Sep 3, 2019
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Abstract
Disclosed are a polyurethane for use in a polishing layer, and a polishing layer and a polishing pad using the same, the polyurethane including a terminal group represented by the following formula (I): R—(OX)n— (I) wherein R represents a monovalent hydrocarbon group having 1 to 30 carbon atoms that may be substituted with a heteroatom or may be interrupted by a heteroatom, X represents an alkylene group having 2 to 4 carbon atoms, 90 to 100% of the alkylene group being an ethylene group, and n represents a number from 8 to 120.
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