FREQUENCY TRACKING FOR SUBSURFACE ATOMIC FORCE MICROSCOPY
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United States of America
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Dec 16, 2021
app pub date -
Oct 24, 2019
filing date -
Oct 24, 2019
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Abstract
A method and system for performing subsurface atomic force microscopy measurements, the system comprising: a signal source for generating an drive signal; a transducer configured to receive the drive signal for converting the drive signal into vibrational waves and coupling said vibrational waves into a stack comprising a sample for interaction with subsurface features within said sample; cantilever tip for contacting the sample for measuring surface displacement resulting from the vibrational waves to determine subsurface features; wherein the system includes a measurement device for measuring a measurement signal returning from the transducer during and/or in between the subsurface atomic force microscopy measurements.
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