RUTHENIUM-BASED NANOWIRES AND METHOD OF MANUFACTURING THE SAME
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United States of America
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Dec 30, 2021
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Nov 30, 2020
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Nov 30, 2020
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Disclosed is a technical idea of forming ruthenium and ruthenium-cobalt alloy nanowires having various diameters using electroplating. More particularly, a technology of forming ruthenium and ruthenium-cobalt alloy nanowires on a porous template, on pores of which nanotubes are deposited using atomic layer deposition (ALD), using electroplating, and annealing the ruthenium and ruthenium-cobalt alloy nanowires to form ruthenium-cobalt alloy nanowires having various diameters.
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