COMPOSITION FOR REMOVING RUTHENIUM

United States of America

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Issued Date
Jan 6, 2022
app pub date
Nov 13, 2019
filing date
Nov 13, 2019

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Abstract

The present invention addresses the problem of providing a remover composition which can sufficiently remove ruthenium (Ru) remaining on substrates and can be inhibited from evolving RuO₄gas. The remover composition, which is for removing ruthenium remaining on substrates, has a pH at 25° C. of 8 or higher and includes one or more pH buffer ingredients.

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Patent Owner(s)

Patent Owner	Address
KANTO KAGAKU KABUSHIKI KAISHA	TOKYO 103-0023

International Classification(s)

C23F:NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM S....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
KASHIWAGI, Itsuki	Tokyo, JP	2	0
OHWADA, Takuo	Tokyo, JP	18	94

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COMPOSITION FOR REMOVING RUTHENIUM

Number of patents in Portfolio can not be more than 2000

United States of America

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