MULTILAYER FILM, OPTICAL DEVICE, PHOTONIC INTEGRATED CIRCUIT DEVICE, AND OPTICAL TRANSCEIVER
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United States of America
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Issued Date -
Jan 6, 2022
app pub date -
May 27, 2021
filing date -
May 27, 2021
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Abstract
A multilayer film includes a single-crystal silicon layer, a first layer containing Zr, a second layer containing ZrO2, and a third layer containing a perovskite oxide having an electrooptic effect. The first layer, the second layer, and the third layer are provided in this order above the single-crystal silicon layer, and the multilayer film is transparent to a wavelength to be used.
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