PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATION DEGRADATION
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United States of America
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Mar 3, 2022
app pub date -
Aug 4, 2021
filing date -
Aug 4, 2021
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Abstract
An optical system includes a bulk material including a fluorine (F)-containing optical material. The bulk material is exposed to an environment at a pressure ranging from atmospheric to vacuum when the bulk material is under extreme ultra-violet (EUV), vacuum ultra-violet (VUV), deep ultra-violet (DUV) and/or UV radiation. The environment includes at least one type of gas or vapor. The at least one type of gas or vapor includes polar molecules.
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