SYNTHETIC GRINDSTONE
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Mar 24, 2022
app pub date -
Nov 30, 2021
filing date -
Nov 30, 2021
priority date (Note) -
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Abstract
A synthetic grindstone (100) for chemo-mechanical grinding a wafer S, comprising: an abrasive (101) that contains cerium oxide having an average particle diameter of 10 μm or less as a main component and has a chemo-mechanical grinding action on the wafer S; a friction promoter (102) that contains a fiber material having a Mohs hardness lower than that of the wafer S and a high friction coefficient as a main component and promotes heat generation; and a binder (103) that contains a phenol resin as a main component and disperses and binds the abrasive (101) and the friction promotor (102).
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