SERIAL AIRLOCK ARCHITECTURE
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United States of America
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Mar 24, 2022
app pub date -
Dec 6, 2021
filing date -
Dec 6, 2021
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Abstract
A method for isolating a first region maintained at a first environment and a second region maintained at a second environment, wherein the first and second environments are different from each other. The method includes forming an airlock between the first region and the second region, in which the airlock includes a plurality of chambers, which are separated by gate valves, successively arranged along a guide path between the first region and the second region. The method also includes maintaining environments in the plurality of chambers so that an environment in one chamber is different from an environment in an adjacent chamber.
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