POLISHING COMPOSITION

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20220089911A1
SERIAL NO

17541881

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Provided is a polishing composition that can effectively improve a polishing removal rate. According to the present invention, a polishing composition for polishing a polishing target material is provided. The polishing composition contains water, an oxidant, and a polishing removal accelerator, and does not contain abrasive. At least one metal salt selected from the group consisting of an alkali metal salt and an alkaline earth metal salt is contained as the polishing removal accelerator.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATEDKIYOSU-SHI AICHI 452-8502

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ITO, Yasuaki Kiyosu-shi, JP 24 119
NOGUCHI, Naoto Kiyosu-shi, JP 22 132
ODA, Hiroyuki Kiyosu-shi, JP 150 1968

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation