Torsion Wing Probe Assembly

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20220107339A1
SERIAL NO

17473577

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Abstract

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A torsional probe for a metrology instrument includes a cantilever coupled to a support structure via a torsion bar. The cantilever, support structure, and arms of torsion bar have substantially the same thickness. A method of manufacture of the torsion probe, as well as a method of using the torsion probe to measure photothermal induced surface displacement of a sample are also described.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO INCCALIFORNIA USA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Shuiqing Santa Barbara, US 28 165
Su, Chanmin Ventura, US 62 764
Wang, Weijie Thousand Oaks, US 84 469
Wanger, Martin Goleta, US 1 0

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