APPARATUS FOR GENERATING AND TRANSPORTING SPECTRAL LINE RADIATION
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United States of America Patent
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Issued Date -
May 26, 2022
app pub date -
Oct 13, 2021
filing date -
Oct 13, 2021
priority date (Note) -
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Abstract
Disclosed is an apparatus for generating and transporting spectral line radiation which may transmit radiation generated from a radiation source accurately to a target. The apparatus includes a radiation source configured to emit atomic, ionic or molecular spectral line radiation, a transmission nozzle configured to transmit the spectral line radiation emitted by the radiation source to the target, and a gas supply channel configured to supply gas in the same environment as the spectral line radiation emitted by the radiation source to an environment around the target.
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