Importance

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Abstract

There is provided a rotary table device including: a rotary table; a center shaft erected toward the rotary table; a housing including an inner peripheral surface having a circular cross section over a predetermined range along a rotation axis; a center sleeve including an outer peripheral surface having a circular cross section corresponding to the inner peripheral surface, and the outer peripheral surface being concentric with the inner peripheral surface; a plurality of recesses formed in at least one of the inner circumferential surface and the outer circumferential surface; a plurality of O-rings disposed to be sandwiched between the inner peripheral surface and the outer peripheral surface; an in-housing fluid flow path formed inside the housing; and a plurality of in-sleeve fluid flow paths formed inside the center sleeve.

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First Claim