POLISHING SOLUTION, POLISHING APPARATUS, AND POLISHING METHOD

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United States of America Patent

APP PUB NO 20220290009A1
SERIAL NO

17447343

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A polishing solution according to an embodiment includes an exothermic agent that generates heat through application of an alternating magnetic field thereto, and a viscosity modifier that undergoes a reversible phase transition between a gel state and a sol state depending on temperature.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
MATSUI, Yukiteru Nagoya Aichi, JP 87 573
SAKASHITA, Mikiya Nagoya Aichi, JP 5 1

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