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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
LAM RESEARCH CORPORATION	4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

• C23F:NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM S....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
KALINOVSKI, Ilia	Berkeley, US	11	179
KAWAGUCHI, Mark	San Carlos, US	20	388
MELAET, Gerome Michel Dominique	San Leandro, US	5	3
MUI, David	Fremont, US	63	1977
MUSSELWHITE, Nathan	San Jose, US	10	26
RAVKIN, Michael	Los Altos, US	72	1438

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	May 10, 2026
7.5 Year Payment	$3600.00	$1800.00	$900.00	May 10, 2030
11.5 Year Payment	$7400.00	$3700.00	$1850.00	May 10, 2034

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2022/0356,585

VAPOR CLEANING OF SUBSTRATE SURFACES

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