METHOD FOR SELECTIVELY REMOVING NICKEL PLATINUM MATERIAL

United States of America Patent

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Issued Date
Nov 24, 2022
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Aug 5, 2022
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Aug 5, 2022

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Abstract

A method of selectively removing NiPt material from a microelectronic substrate, the method comprising contacting the NiPt material with an aqueous etching composition comprising:

an oxidising agent;a strong acid; anda source of chloride.

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ENTEGRIS INC	129 CONCORD ROAD BILLERICA MA 01821

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Inventor Name	Address	# of filed Patents	Total Citations
HONG, SeongJin	Cheongju-si, KR	15	22

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METHOD FOR SELECTIVELY REMOVING NICKEL PLATINUM MATERIAL

Number of patents in Portfolio can not be more than 2000

United States of America Patent

17882199

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17882199

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