LINE NARROWING GAS LASER DEVICE, CONTROL METHOD THEREOF, AND ELECTRONIC DEVICE MANUFACTURING METHOD

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United States of America Patent

APP PUB NO 20220385022A1
SERIAL NO

17818180

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Abstract

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A control method of a line narrowing gas laser device includes receiving a command of either a single-wavelength mode command or a multi-wavelength mode command from an external apparatus, and controlling the line narrowing gas laser device to generate pulse laser light in accordance with the command.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INC400 OAZA YOKOKURASHINDEN OYAMA-SHI TOCHIGI 323-8558

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KUMAZAKI, Takahito Oyama-shi, JP 31 189
WAKABAYASHI, Osamu Oyama-shi, JP 394 4239

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