TEMPERATURE CONTROL DEVICE AND SUBSTRATE PROCESSING APPARATUS
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United States of America Patent
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Issued Date -
Dec 8, 2022
app pub date -
May 31, 2022
filing date -
May 31, 2022
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Abstract
A temperature control device includes a first tank that stores a first heat medium; a second tank that stores a second heat medium having a temperature different from a temperature of the first heat medium, and a first communication pipe configured to connect a position where an upper limit level of a height of a liquid level is located in an interior of the first tank and a position where a lower limit level of a height of a liquid level is located in an interior of the second tank.
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