CAPACITORS IN A GLASS SUBSTRATE
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United States of America Patent
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Issued Date -
Dec 22, 2022
app pub date -
Jun 17, 2021
filing date -
Jun 17, 2021
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Abstract
Embodiments described herein may be related to apparatuses, processes, and techniques related to creating capacitors at the interface of a glass substrate. These capacitors may be three-dimensional (3-D) capacitors formed using trenches within the glass core of the substrate using laser-assisted etching techniques. A first electrode may be formed on the glass, including on the surface of trenches or other features etched in the glass, followed by a deposition of a dielectric material or a capacitive material. A second electrode may then be formed on top of the dielectric material. Other embodiments may be described and/or claimed.
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