CAPACITOR STRUCTURE AND MANUFACTURING METHOD AND OPERATING METHOD THEREOF
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United States of America Patent
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Issued Date -
Jan 12, 2023
app pub date -
Jul 8, 2021
filing date -
Jul 8, 2021
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Abstract
A capacitor structure, a method for manufacturing a capacitor structure and a method for operating a capacitor structure are provided. The capacitor structure includes a first electrode and a second electrode; a dielectric layer between the first electrode and the second electrode; and an oxygen donor layer between the dielectric layer and the first electrode. An oxygen concentration of the oxygen donor layer increases along a thickness direction from a first surface proximal to the dielectric layer to a second surface proximal to the first electrode.
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