Composite binding agent grinding wheel and preparation method thereof

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United States of America Patent

PATENT NO 11858093
APP PUB NO 20230042029A1
SERIAL NO

17555059

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Abstract

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The present application relates to a composite binding agent grinding wheel, wherein a weight percentage of each raw material of the grinding wheel is: 45-65% of pretreatment abrasive, 8-20% of resin bonding agent, 5-12% of hexagonal boron nitride, 5-10% of silicon dioxide, 5-15% of ceramic powder, 6-12% of prealloy powder bonding agent, and 1-3% of boron powder. The composite binding agent super-hard grinding wheel prepared by the present application can achieve nano-level grinding surface quality when grinding epitaxial wafers, and the grinding wheel has strong self-sharpening and high sharpness. It has obvious advantages in the finishing of silicon carbide crystal epitaxial wafers, which can solve the current limitations of back thinning processing of silicon carbide crystal epitaxial wafers.

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Patent Owner(s)

Patent OwnerAddress
ZHENGZHOU RESEARCH INSTITUTE FOR ABRASIVES & GRINDING CO LTDNO 121 WUTONG STREET HIGH-TECH DEVELOPMENT ZONE ZHENGZHOU HENAN 450001

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cao, Jianfeng Henan, CN 5 27
Qian, Guanwen Henan, CN 1 0
Sun, Guannan Henan, CN 3 0
Wang, Lihua Henan, CN 100 798
Zhang, Gaoliang Henan, CN 1 0
Zhao, Yanjun Henan, CN 7 3
Zuo, Donghua Henan, CN 1 0

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