SU-8 etching technique using molten salt

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United States of America Patent

PATENT NO 11920252
APP PUB NO 20230044483A1
SERIAL NO

17394906

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A method of decomposing a cured aromatic epoxy resin uses a molten salt bath at less than about 350° C. The molten salt bath includes a plurality of alkali metal hydroxides. The cured aromatic epoxy resin can be in intimate physical contact with a metal or alloy. The cured aromatic epoxy resin can be patterned by a lithographic method. The lithographic method can be multibeam interference lithography to form a three-dimensional photonic crystal template on a conductive substrate for electrodeposition of metal. Contacting the three-dimensional photonic crystal template with the electrodeposited metal with the molten salt bath can form a metal matrix device displaying a periodic pattern that is the inverse of the periodic pattern of the decomposed three-dimensional photonic crystal template.

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Patent OwnerAddress
TOYOTA JIDOSHA KABUSHIKI KAISHATOYOTA-SHI AICHI 471-8571

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Braun, Paul Vannest Champaign, US 8 70
Joshi, Shailesh N Ann Arbor, US 187 923
Lan, Kai-Wei Champaign, US 9 3
Lohan, Danny J Ann Arbor, US 32 20
Singhal, Gaurav Champaign, US 16 5

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