INTERFACE MODULE WITH SAFETY INTERLOCK SYSTEM, STORAGE MEDIUM, AND SAFETY VERIFICATION METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20230069600A1
SERIAL NO

17823249

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Examples of an interface module includes a fan filter unit having a fan and a filter, a housing surrounding a space adjacent to the filter, the housing includes a door, an upper housing surrounding a space adjacent to the fan, a first port provided in the upper housing, a second port communicating to a FFU internal space, the FFU internal space is a space between the fan and the filter in the fan filter unit, and a differential pressure gauge connected to the first port and the second port to detect a differential pressure between an interior of the upper housing and the FFU internal space.

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Patent Owner(s)

Patent OwnerAddress
ASM IP HOLDING B V1322 AP ALMERE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Wataru Sagamihara-shi, JP 49 210
Nakano, Masashi Tokyo, JP 21 114

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