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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
DUPONT ELECTRONIC MATERIALS HOLDING INC	451 BELLEVUE ROAD NEWARK DE 19713

International Classification(s)

• B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....
• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
• B24D:TOOLS FOR GRINDING, BUFFING, OR SHARPENING

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
BLOMQUIST, Robert M	River Edge, US	11	30
EL-SAYED, Lyla M	Boonton, US	19	179
MILLS, Michael E	Bear, US	41	469
QIAN, Bainian	Newark, US	54	363
REDDY, Kancharla-Arun	Wilmington, US	2	1
TAYLOR, Bradley K	West Chester, US	12	129
XIA, Shijing	Hockessin, US	3	12

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Oct 13, 2026
7.5 Year Payment	$3600.00	$1800.00	$900.00	Oct 13, 2030
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Oct 13, 2034

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2023/0112,228

CHEMICAL MECHANICAL POLISHING PAD AND PREPARATION THEREOF

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