METHODS FOR WET ETCHING OF NOBLE METALS
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United States of America Patent
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Issued Date -
Apr 20, 2023
app pub date -
Nov 14, 2022
filing date -
Nov 14, 2022
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Abstract
The present disclosure provides improved wet etch processes and methods for etching noble metals. More specifically, the present disclosure provides various embodiments of wet etch processes and methods that utilize new etch chemistries for etching noble metals, such as ruthenium (Ru), gold (Au), platinum (Pt) and iridium (Ir), in a wet etch process. In general, the disclosed embodiments expose a noble metal surface to a first etch solution to chemically modify the noble metal surface and form a noble metal salt passivation layer, which can then be selectively dissolved in a second etch solution to etch the noble metal surface.
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