POLISHING OF POLYCRYSTALLINE MATERIALS

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United States of America Patent

APP PUB NO 20230127390A1
SERIAL NO

17970371

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Abstract

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The invention provides methodology for final finishing of hard surfaces such as diamond surfaces. In this method, a smooth pad having a surface roughness of about 0.2 nm to about 100 nm, having, for example a thickness ranging from about 0.02 mm to about 5 mm, and a Shore D hardness of 30 or higher, is utilized in conjunction with known polishing slurries to provide diamond surfaces having superior smooth finishes.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Sunny Gainesville, US 7 0
Singh, Rajiv K Newberry, US 44 794

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