MODULAR MULTI-DIRECTIONAL GAS MIXING BLOCK

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United States of America Patent

APP PUB NO 20230139688A1
SERIAL NO

17514430

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Exemplary modular gas delivery assemblies may include a plurality of modular gas blocks coupled together. Each gas block may include an upper portion and a lower portion. A first end of the upper portion may extend beyond a first end of the lower portion and a second end of the lower portion may extend beyond a second end of the upper portion. A first fluid channel may include a first fluid port, a second fluid port, and a third fluid port. The block body may define a second fluid channel that extends transversely to the first fluid channel. A first modular gas block may be coupled with a second modular gas block and a third modular gas block such that the first fluid channels of each of the first, second, and third modular gas blocks are fluidly coupled with one another.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alam, Syed A San Jose, US 5 0
Benjamin, Raj Daemian Raj Fremont, US 22 24
Garikipati, Kiran Santa Clara, US 17 3519
Langeland, Kurt R San Jose, US 3 0

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