ELECTROSTATIC CHUCK
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United States of America Patent
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Issued Date -
May 11, 2023
app pub date -
Nov 9, 2022
filing date -
Nov 10, 2021
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Abstract
An electrostatic chuck includes a base plate, a ceramic plate fixed to the base plate and including an electrode embedded in the ceramic plate, and a resin layer bonding the base plate and the ceramic plate and including one or more adhesives. In at least one of the one or more adhesives, a temperature corresponding to an extreme value of a loss tangent in a temperature range of −150° C. to 250° C. is −70° C. or lower.
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