CLEANING LIQUID USED FOR CLEANING METAL RESISTS, AND CLEANING METHOD USING CLEANING LIQUID

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United States of America Patent

APP PUB NO 20230183866A1
SERIAL NO

18062841

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Abstract

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A metal resist remover containing a solvent and a strong acid that is liquid at 20° C., in which a pH value, which is measured with a pH meter, of a liquid formed by subjecting the cleaning liquid to a 10-fold dilution with pure water is 2.5 or less.

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Patent Owner(s)

Patent OwnerAddress
TOKYO OHKA KOGYO CO LTDKAWASAKI-SHI KANAGAWA 211-0012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KUMAGAI, Tomoya Kawasaki-shi, JP 38 214
SUGAWARA, Mai Kawasaki-shi, JP 19 55

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